• Technical Conference & Exhibit:  01 – 04 November 2021
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Optical Imaging Interferometric Microscopy with Grating Coupler Illumination (JTh5A.55)

Presenter: Preyom Dey, University of New Mexico

A new technique of extending the resolution limit for synthetic aperture microscopy with off-axis coherent illumination through a superstrate is used to image a 120nm CD structure with a 0.4NA lens at 532nm (Abbe limit:~665nm).

Authors:Preyom Dey, University of New Mexico / Alexander Neumann, University of New Mexico / Steve Brueck, University of New Mexico

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