Eliminating Sidewall Roughness in Microdisk Resonator using Focused Ion Beam Polishing (JTu4A.21)
Presenter: Lekshmi Eswaramoorthy, Indian Institute of Technology Bombay
Sidewall roughness significantly impacts the Quality (Q) factor of microdisks by causing scattering losses. In this work, we report using Focused Ion Beam (FIB) polishing to achieve near-perfect smooth sidewalls, effectively enhancing the Q-factor.
Authors:Lekshmi Eswaramoorthy, Indian Institute of Technology Bombay / Brijesh Kumar, Indian Institute of Technology Bombay / Parul Sharma, Indian Institute of Technology Bombay / Anuj Kumar Singh, Indian Institute of Technology Bombay / Abhay Anand, Indian Institute of Technology Bombay / Sudha Mokkapati, Monash University / Anshuman Kumar, Indian Institute of Technology Bombay