• Technical Conference & Virtual Exhibits:  14 – 17 September 2020
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Monolithically integrated membrane-in-the-middle cavity optomechanical systems (QW6A.2)

Presenter: Lintong Bu, University of Alberta

We describe a monolithic surface-micromachining process for embedding silicon nitride membranes inside Fabry-Perot cavities on a chip. Preliminary measurements of the mechanical resonance spectra are in good agreement with theoretical predictions.

Authors:Graham Hornig, University of Alberta / Ray DeCorby, University of Alberta / Lintong Bu, University of Alberta


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